http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201320353-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fd1e4193f0f5eb58621db6ec20566a5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78618 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_694bce72f79fb89fe8e8b3e0be6f135e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a24ef0a839925e16402357081f651097 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c4fa759ddd1c0a696e4a59ee442b55d |
| publicationDate | 2013-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201320353-A |
| titleOfInvention | Amorphous oxide semiconductor thin film transistor manufacturing method |
| abstract | The present invention provides systems, methods and apparatus for fabricating thin film transistor devices. In one aspect, a substrate having a source region, a drain region, and a channel region is provided. The substrate also includes an oxide semiconductor layer, a first dielectric layer overlying the channel region of the substrate, and a first metal layer over the dielectric layer. Hydrogen ions are implanted in the oxide semiconductor layer overlying the source region and the drain region of the substrate by a plasma immersion ion implantation process. The hydrogen ions are implanted into a doped n-type oxide semiconductor in the oxide semiconductor layer overlying the source region and the drain region of the substrate. |
| priorityDate | 2011-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.