| abstract |
The present invention is directed to novel neutral layer compositions and methods of using such neutral layer compositions to align the microstructures of the self-assembled block copolymers (BCP). The compositions and methods can be used to fabricate electronic devices. The neutral layer composition comprises at least one random copolymer having at least one unit of structure (1), at least one unit of structure (2) and at least one unit of structure (3) wherein R1 is Selectively a C1-C8 alkyl group, a C1-C8 fluoroalkyl moiety, a C1-C8 partially fluorinated alkyl group, a C4-C8 cycloalkyl group, a C4-C8 cyclofluoroalkyl group, a C4-C8 partially fluorinated cycloalkyl group, and a group of C2-C8 hydroxyalkyl groups; R2, R3 and R5 are independently selected from the group consisting of H, C1-C4 alkyl, CF3 and F; R4 is selected from H, C1-C8 alkyl, C1-C8 moieties a group consisting of a fluorinated alkyl group and a C1-C8 fluoroalkyl group, n is in the range of 1 to 5, and R6 is selected from the group consisting of H, F, C1-C8 alkyl and C1-C8 fluoroalkyl groups and m is 1 To the range of 3. |