| abstract |
The present invention relates to a radiation sensitive resin composition containing [A] a compound represented by the following formula (1), and [B] having a structure selected from a (meth) acrylate derived from a lactone skeleton. a unit derived from a structural unit containing a (meth) acrylate of a cyclic carbonate skeleton, a structural unit derived from a (meth) acrylate containing a sultone skeleton, and a (meth) derived from a polar group A matrix polymer of at least one group of acrylate structural units. In the following formula (1), R1 is a monovalent cyclic organic group having a cyclic ester structure or a cyclic ketone structure. R2 is a single bond or -CH2-. X is -O-*, -COO-*, -O-CO-O-* or -SO2-O-*. However, * indicates the bonding site with R3. R3 is a divalent chain hydrocarbon group having 1 to 5 carbon atoms. M+ is a monovalent cation. R1-R2-X-R3-CHF-CF2-SO3-M+ (1) |