http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201316576-A

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filingDate 2012-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2013-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201316576-A
titleOfInvention Superconducting thin film material and manufacturing method thereof
abstract The present invention provides a superconducting thin film material exhibiting excellent superconducting properties and a method of manufacturing the same. The superconducting thin film material (1) includes a substrate (10) and a superconducting film (30) formed on the substrate (10). The superconducting film (30) includes a MOD layer (31) formed by the MOD method and a vapor phase synthesis layer (32) formed on the MOD layer (31) by a vapor phase method. Thus, the MOD layer (31) is formed first, and then the vapor phase synthesis layer (32) is formed, so that the heat treatment (heat treatment by the MOD method) in the step of forming the MOD layer (31) can be prevented from causing the characteristics of the vapor phase synthesis layer (32). Deterioration.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I648750-B
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