| abstract |
The present invention provides a dry etchant that has less impact on the global environment and has desirable properties. The present invention provides a dry etchant which respectively contains a formula (A): CaFbHc in a specific volume % (wherein, a, b and c respectively represent a positive integer, satisfying 2≦a≦5, c<b≧1, 2a +2> relationship of b+c and b≦a+c. Among them, a=3, b=4, and c=2, except for the fluorine-containing unsaturated hydrocarbon, (B) is selected from O2, O3, At least one of CO, CO2, COCl2, COF2, F2, NF3, Cl2, Br2, I2, and YFn (wherein Y represents Cl, Br, or I. n represents an integer from 1 to 5) and C) at least one gas selected from the group consisting of N2, He, Ar, Ne, Xe, and Kr. |