http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201312257-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-38 |
| filingDate | 2012-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6c27c179610fef7e678f256be168af2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_effd9a21114c0fea9083d9220c124366 |
| publicationDate | 2013-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201312257-A |
| titleOfInvention | Reflective mask substrate, method for manufacturing reflective mask substrate, and quality management method for reflective mask substrate |
| abstract | The present invention relates to a reflective mask substrate having a substrate, a reflective multilayer film that reflects exposure light, and an absorber layer that absorbs the exposure light, and further includes a fiducial mark on the surface of the reflective multilayer film. Or a surface formed on one of the layers between the reflective multilayer film and the absorbing layer is formed in a concave shape or a convex shape, and represents a reference position of the reflective multilayer film, the reference mark is a reflectance of light for a specific wavelength and the reference The periphery of the mark is formed differently and transferred to a layer formed on the above-mentioned reference mark. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I808103-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I710850-B |
| priorityDate | 2011-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.