http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201311869-A

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
filingDate 2012-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0ab1cef1b47c50ebe6594cec2146bb2
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publicationDate 2013-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201311869-A
titleOfInvention Composition and method for selectively etching tantalum nitride
abstract The present invention relates to a composition suitable for selectively removing a tantalum nitride material relative to a cerium oxide material from a microelectronic device having a tantalum nitride material and a yttria material thereon. The removal composition comprises at least one alkoxydecane, at least one etchant, at least one oxidizing agent, at least one organic solvent, and water.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109689838-A
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priorityDate 2011-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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