| abstract |
A metal foil coated with an insulating film having an organic/inorganic hybrid layer on one or both sides, and the organic/inorganic hybrid layer containing dimethyloxoxane and a metalloxane composed of a metal other than Si . The concentration of Si [Si] 1/4t relative to the concentration of Si [Si]3/4t is [Si]1/4t<[Si]3/4t, and ([Si]3/4t-[Si]1/4t /[Si]3/4t is 0.02~0.23, and the concentration [Si]3/4t is the Si concentration at a depth of 3/4t from the surface of the same layer along the thickness direction of the mixed layer, the concentration [Si]1/ 4t is a Si concentration which is 1/4t deep from the surface of the same layer along the thickness direction of the organic ‧ inorganic mixed layer. The present invention provides a metal foil which is suitable for use in a solar cell substrate or a flexible circuit board, etc., which has insulation, heat resistance, flexibility, and surface flatness, and is difficult to make the layer during handling of the substrate such as transporting or remounting. Surface damage. |