| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78606
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2012-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8130af925c6a1eb094a233aaee403125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_586895aa1b81c721a521af2c2945bb5b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d465c0467420f3d1dbff1ab9602d5056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e21546b63609a1337d3e791540170228 |
| publicationDate |
2013-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201308609-A |
| titleOfInvention |
Method for forming a thin film transistor |
| abstract |
The present invention generally relates to a method of making a thin film transistor. The thin film transistor has an active channel including indium gallium zinc oxide or zinc oxide. The active channel is exposed to a nitrous oxide plasma or an oxygen plasma after the source electrode and the drain electrode are formed, but before the protective layer or etch stop layer is deposited thereon. During the formation of the source and drain electrodes, the interface between the active and protective or etch stop layers may be altered or damaged. The nitrous oxide plasma or oxygen plasma changes and repairs the interface between the active channel and the protective or etch stop layer. |
| priorityDate |
2011-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |