| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8fe6b6115a7e5ede9984cde9aa6191 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-15 |
| filingDate |
2011-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_823c8458af7fb92d8ffda80fb1abcbe0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ab9fd901b7a3b2a8fcedd93da985478
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db476a5f96b820e9b4f35c3af78b818b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebb4633adc875e66377f9b1b1af8b5e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a37386792eba0332fa143d8162dafbcb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ef5c131816974953ec672edeb89a835 |
| publicationDate |
2013-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201307836-A |
| titleOfInvention |
Fluid sensor and method of manufacturing same |
| abstract |
A fluid sensor and a method of manufacturing the same. The manufacturing method includes the steps of: forming a first electrode layer on one side of the substrate; etching the substrate to form a cavity; forming a piezoelectric layer on the side of the substrate; forming a second electrode layer on the piezoelectric layer Forming a bonding metal layer in the cavity and on the first electrode layer; and forming a fluid detecting metal layer on the bonding metal layer. |
| priorityDate |
2011-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |