http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201305382-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45572 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45517 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2012-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cfbc290574d0fab8f5b528346098eac |
| publicationDate | 2013-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201305382-A |
| titleOfInvention | Spray plate manufacturing method, shower plate and vapor deposition device using same |
| abstract | A method for manufacturing a shower plate (113) for a vapor deposition apparatus (100), comprising the steps of: providing a hole in each of a first constituent member (1031) and a second constituent member (1032) a through hole (1031a, 1032a) of the step portion (1031b, 1032b); a one end of the gas discharge pipe (1033) is inserted into the hole step portion (1031b); and the other end of the gas discharge pipe protrudes from the second constituent member The gas discharge pipe is inserted into the through hole (1032a); the hole step portion (1031b) and the gas discharge pipe are welded to each other; the hole step portion (1032b) and the gas discharge pipe are welded to each other; A constituent member (1031) and a second constituent member (1032) are welded to each other. The shower plate (113) can correspond to the enlargement of the vapor deposition apparatus, and contributes to manufacturing a high-quality semiconductor element having a uniform film thickness and a uniform composition ratio. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I734819-B |
| priorityDate | 2011-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.