| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2499
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2559
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-7761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D11-138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45512 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2012-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d62bca5351c77b388a2e9252a0d72d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23d7db299bd273b2061d12a2a86c7953 |
| publicationDate |
2013-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201305381-A |
| titleOfInvention |
Vapor delivery device and method of making and using same |
| abstract |
A method comprising delivering a first carrier gas stream to a delivery device comprising a solid precursor compound. The temperature of the first carrier gas stream is greater than or equal to 20 °C. The method further includes delivering a second carrier gas stream downstream of the delivery device. The first stream and the second stream are combined to form a third stream such that the vapor dew point of the precursor compound in the third stream is below ambient temperature. The flow direction of the first flow, the flow direction of the second flow, and the flow direction of the third flow are unidirectional and are not opposite to each other. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I757998-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I788126-B |
| priorityDate |
2011-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |