http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201304178-A

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filingDate 2011-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ece51bcbef9342d4fe7ea8de556354b
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publicationDate 2013-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201304178-A
titleOfInvention Thin film solar cell manufacturing method
abstract A method of manufacturing a thin film solar cell. First, a first electrode layer is formed on a substrate; then a p-type semiconductor layer is formed on the first electrode layer; then an intrinsic layer is formed on the p-type semiconductor layer; then an n-type semiconductor layer is formed on the intrinsic layer And then treating the n-type semiconductor layer with a carbon dioxide plasma to form an oxide film layer; then hydrogenating the n-type semiconductor layer exposed to the oxide film layer with a high pressure hydrogen; finally forming a second electrode layer on the oxide film layer .
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