| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73aeddf6b80f70ea84bb645d4f4edf75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4933
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-456 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4933
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56 |
| filingDate |
2012-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b88d77ae09f1baa2cfefdb1a7953277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_866ed5cda35f973ac7fc6a3769ee337e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1df325a94e2cce01d62d112522a631d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0635ac2310a27bc5944ccba28e7264a1 |
| publicationDate |
2013-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201303062-A |
| titleOfInvention |
Metal telluride, metal telluride, method for producing the same, and nickel film deposition |
| abstract |
The present invention provides a method of deuteration and deuteration. In some embodiments, a method of forming a metal telluride can include forming a non-oxide interface such as germanium or solid germanium over an exposed germanium region of the substrate. A metal oxide is formed over the interface layer. Annealing and reduction causes the metal from the metal oxide to react with the underlying layer and form a metal halide. Alternatively, the metal telluride can be formed by reduction of the metal oxide on the ruthenium, regardless of whether any underlying ruthenium is also deuterated. In other embodiments, nickel is deposited directly without the use of an interfacial layer. The present invention also provides a method of depositing a nickel thin film by a vapor deposition process. In some embodiments. A nickel film is deposited by ALD. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I684667-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10619241-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I736541-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I582260-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I555870-B |
| priorityDate |
2011-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |