http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201301405-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78603 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78606 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2012-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09932973f1b813ee358d0f722fee1a93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf0a77ffc22328298fb7190ebe0dee35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbc08ddc6d66d2b1382be7470af1e3cf |
| publicationDate | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201301405-A |
| titleOfInvention | Semiconductor device and method of manufacturing same |
| abstract | The transistor including the oxide semiconductor film includes hydrogen (hydrogen capture film) for capturing oxide film from the oxide semiconductor film and hydrogen diffusion film (hydrogen permeable film) for diffusion of hydrogen from the oxide semiconductor by heat treatment. The membrane is transferred to the hydrogen capture membrane via a hydrogen permeable membrane. Specifically, the base film or the protective film of the transistor including the oxide semiconductor film has a stacked layer structure of a hydrogen scavenging film and a hydrogen permeable film. At this time, a hydrogen permeable film is formed on the side contacting the oxide semiconductor film. Thereafter, hydrogen released from the oxide semiconductor film is transferred to the hydrogen scavenging film via the hydrogen permeable membrane by heat treatment. |
| priorityDate | 2011-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 64.