http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201301372-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31b1220216408a6076f55e0ba4ec1003 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 2012-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b9840364c8e259c8429b78fcb4d574e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b02f0cc28fedfabe13f9ebf1e04fb619 |
| publicationDate | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201301372-A |
| titleOfInvention | Semiconductor substrate and method of manufacturing same |
| abstract | The invention relates to a method of manufacturing a semiconductor substrate, the method comprising the steps of: forming a donor substrate (1) comprising a support layer (2) composed of a first semiconductor material, and a semiconductor material comprising a strained seed layer (3), - making the support layer (2) porous, - treating the donor substrate (1) to expand or contract to form the first semiconductor material The porous support layer (2') is deformed, which causes relaxation in the seed layer (3'), and the seed layer (3' formed by the second semiconductor material is formed by one step of growing the second material. The thickness of the film is increased, forming a strain layer (5) which is in contact with the seed layer (3') and consists of a third semiconductor material, and - at least the strain layer (5) composed of the third material A portion is transferred from the donor substrate (1) to a receptor substrate (8). |
| priorityDate | 2011-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558793 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23950 |
Total number of triples: 17.