http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201250837-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_442006254efb98c9cebec6ee5a08d5e8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_950cc5626a363ff6c2b6b0ed26c826d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1c0300fe6aab792af0204a3a96197b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05e55a3664c47a15852e71463bb0f1f |
| publicationDate | 2012-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201250837-A |
| titleOfInvention | Method of preparing oxide film using electrolysis oxidation |
| abstract | The present invention relates to a method of preparing oxide film using electrolysis oxidation. An anode and a cathode are placed into an electrolyte solution, wherein the anode is a substrate having conductive nitride film, and the temperature range of the electrolyte solution is greater than 20 degree Celsius and less than 100 degree Celsius. Afterward 50 V to 1000 V voltage is applied to the anode and the cathode. Finally, an oxide film is formed on the surface of the conductive nitride film of the anode. By comparing with a conventional method of preparing the oxide film, the present invention not only prepares the oxide film more quickly but also has better crystallization for the oxide film. |
| priorityDate | 2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.