http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201246332-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_950bce8d103dab1bd282965fde47f9f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44151d28c961fb8e73df559ec4fd7df0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6895aece2b37a86f1ff992fed360a4d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30cf23fd95626dd93e917a5432f2f753 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5b57f5ea9b21c8867fe611298f76d3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b163d5a313e1389189785ee6b798b6c9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c4c9293ceda17b922aee43bf0b42fd7 |
| publicationDate | 2012-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201246332-A |
| titleOfInvention | Substantially non-oxidizing plasma treatment devices and processes |
| abstract | Non-oxidizing plasma treatment devices for treating a semiconductor workpiece generally include a substantially non-oxidizing gas source; a plasma generating component in fluid communication with the non-oxidizing gas source; a process chamber in fluid communication with the plasma generating component, and an exhaust conduit centrally located in a bottom wall of the process chamber. In one embodiment, the process chamber is formed of an aluminum alloy containing less than 0.15% copper by weight; In other embodiments, the process chamber includes a coating of a non-copper containing material to prevent formation of copper hydride during processing with substantially non-oxidizing plasma. In still other embodiments, the process chamber walls are configured to be heated during plasma processing. Also disclosed are non-oxidizing plasma processes. |
| priorityDate | 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.