http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201243985-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67201 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67196 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J11-0095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67703 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2012-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf689a8d148670dac7fcb4d4d1190b7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_627c50144f1f5f5cf8831c498e16ed15 |
| publicationDate | 2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201243985-A |
| titleOfInvention | Vacuum processing apparatus |
| abstract | To improve the transport efficiency and throughput of a vacuum transport system comprising a plurality of vacuum transport mechanisms. In this vacuum processing apparatus, four process modules PM1, PM2, PM3 and PM4 and four load lock modules LML1, LML2, LMU1 and LMU2 are arranged in a cluster around the periphery of a two-tiered vacuum transport chamber 10. Here, the entire second tier of the vacuum transport chamber 10 is composed of a third vacuum transport area TE3, and this third vacuum transport area TE3 descends from tier two to tier one through an opening 13 that demarcates a first vacuum transport area T1 from a second vacuum transport area T2. A third vacuum transport robot 34 comprises left and right side horizontal transport sections HR1 and HR2 capable of linear movement in the depth direction (X direction) of the second tier of the third vacuum transport area TE3, and left and right side vertical transport sections VR1 and VR2 capable of linear movement in the vertical direction (Z direction), namely ascending and descending, through the opening 13 of the third vacuum transport area TE3. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10161038-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11280001-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I706051-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I697065-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I621734-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106033737-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I567229-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I662644-B |
| priorityDate | 2011-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.