http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201243962-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1368 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2012-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9b1142650c9b8453c8c7d3f6747e0dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09ef70fa2d20d37184cb744c1bcd91ee |
| publicationDate | 2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201243962-A |
| titleOfInvention | Method for manufacturing thin-film transistor substrate, thin-film transistor substrate manufactured by same, and display device |
| abstract | A method for manufacturing a thin-film transistor substrate, comprising: a step of forming a gate electrode (11aa) on an insulating substrate (10a); a step of forming a first gate insulating layer (12a) comprising a silicon nitride film so as to cover the gate electrode (11a), and subsequently supplying an oxygen radical to a front surface of the first gate insulating layer (12a) to conduct a surface treatment; a step of forming a second gate insulating layer (12b) comprising a silicon oxide film on the first gate insulating layer (12a); and a step of forming an oxide semiconductor layer (12a) on the second gate insulating layer (12b). |
| priorityDate | 2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.