http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201241867-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff8a75c61fe5f0c18b1bd24eeaef2e43 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2011-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66f30180356ec72cc9ac8de34bb3d0c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c065ab31f94c9902e7171d7842c22dec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9436b42f39c7eed3e30b64bcbfd12a8e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22c4776b0c1cd1681065d8d951d0ebff |
| publicationDate | 2012-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201241867-A |
| titleOfInvention | Radio frequency shielding fence for plasma process reaction chamber |
| abstract | The present invention provides a radio frequency shielding fence for plasma process reaction chamber. The plasma process reaction chamber comprises a reaction chamber shell, and the reaction chamber shell is configured with holes, wherein the radio frequency shielding fence is configured on the reaction chamber shell, and at least partially covers the holes, and the radio frequency shielding fence is made of conductive elastomer material. The present invention further provides a plasma processing system including the aforementioned radio frequency shielding fence and a radio frequency shielding method for the plasma process reaction chamber. The radio frequency shielding mechanism employed by the present invention can have better radio frequency shielding effect, be convenient to install and dismount, and can save the space for reaction chamber. |
| priorityDate | 2011-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23950 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558793 |
Total number of triples: 15.