http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201241426-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 |
| filingDate | 2012-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95c06753c3ac405b59885bf850eb8fd5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a11d420683f3fdaafe9f87657c1208a |
| publicationDate | 2012-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201241426-A |
| titleOfInvention | Observation device, inspection device, method for manufacturing semiconductor device, and substrate support member |
| abstract | The present invention suppresses reductions in inspection precision caused by reflected and scattered light produced by wafer holders. In a wafer holder (10) that has protruding support parts (11) that contact and support a wafer and groove parts (12) that are separated from the wafer, the protruding support parts (11) are extended continuously from a part that supports one edge of the wafer to a part that supports the other edge of the wafer. Connecting parts (13) that connect adjacent protruding support parts (11) are provided in each of the vicinity of the parts supporting the one edge and the vicinity of the parts supporting the other edge. |
| priorityDate | 2011-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.