| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39e7c2477a68e95ac2718cc9e5d715bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53b964925ee24e83c5a7d3b566c057bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51875524e3cae02ae000320ae9aba0e7 |
| publicationDate |
2012-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201237954-A |
| titleOfInvention |
Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method |
| abstract |
An aqueous dispersion for chemical mechanical polishing relating to the present invention is characterized in comprising: (A) abrasive grains; (B) a polyvalent carboxylic acid compound in which the total fat chain length present between carboxyl groups is 9 carbons or greater; and (C) an anionic surfactant. |
| priorityDate |
2010-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |