http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201235796-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K3-00 |
| filingDate | 2011-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63458544a32c86eb484da2fd22ec37da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31eaeb2bb2e600c990e62bace0102f74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89e0707f9df33389598c8b92a4cf3bfe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a95ca422ccde8ccba547a82acb6eeedf |
| publicationDate | 2012-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201235796-A |
| titleOfInvention | Methods, systems and apparatus for monitoring integrity of an article, EUV optical apparatus incorporating the same |
| abstract | Methods, systems and apparatus are described for monitoring integrity and/or a contamination particle of an article, which may be, for example, a spectral purity filter in an EUV lithographic apparatus. To monitor integrity of an article operating in a low pressure environment, a beam of electrons is directed toward the article within the environment. The article when intact is configured to stop at least a proportion of the electrons in the beam, and a signal is generated to indicate integrity status of the article by identifying when at least a part of the article is not stopping the expected proportion of electrons in the beam. The electrons can be detected in the article itself, or in a screen or other detection device behind the article. EUV optical apparatus incorporating the methods, systems and apparatus are also described. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9913357-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I551959-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105830198-A |
| priorityDate | 2010-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24404 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559532 |
Total number of triples: 22.