| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2012-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b8a67ad410453d6db3bb7a3e392cd82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8f4943dea3a304a72b82660e9c8daa9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e835ceba29ff5d76ca2fce0449b29821
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06c8b9e0e1cb35e7cf0dbdf201a14309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92f938c9371b233ccb87526d800d2bd8 |
| publicationDate |
2012-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201235455-A |
| titleOfInvention |
CMP slurry and method for manufacturing the same, method for manufacturing composite particle and method for polishing substrate |
| abstract |
A CMP slurry of the invention includes water and polishing particles with composite particles. The composite particle has a core containing a first particle and a second particle disposed on the core. The first particle contains silicon dioxide, and the second particle contains cerous hydroxide. The pH value of the CMP slurry is not more than 9.5. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I657130-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10494547-B2 |
| priorityDate |
2011-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |