http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201234445-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-34 |
| filingDate | 2011-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bec9f6b332b3d1eaf62af8bb8019dbf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8e83fcce5897051cde573105ec4e1a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3f4f1d7a9e2d8c3a2500d09ff7b6d8b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_031db81df45b830fb3e4fa99b741aa92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed9145d77135f587faa00f9159216c7f |
| publicationDate | 2012-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201234445-A |
| titleOfInvention | Workpiece wetting and cleaning |
| abstract | In a workpiece processor (10), a head (12) is moveable onto a bowl (56) to form a process chamber (58). A workpiece (100) can be cleaned in the processor by immersing the workpiece into a liquid bath in the bowl and then boiling the liquid. Vacuum may be applied to the chamber to reduce the pressure within the chamber, thereby reducing the boiling temperature of the liquid and allowing processing at lower temperatures. In a separate method for prewetting a workpiece, a humid gas is provided into the process chamber and condenses on the workpiece. In another separate method for wetting a workpiece, liquid water is provided into the bowl, with the workpiece above the liquid water. Water vapor is created in the process chamber by applying vacuum to the process chamber. The vapor wets the workpiece. The workpiece is then further wetted by submerging the workpiece into the liquid water. |
| priorityDate | 2010-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.