| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e89cc2c12f45d859e75fc319ba7d5a9 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2011-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8d2dbe80279e00b5c6fef3037e41f94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f86fe1df54f1098f9ac78d44e198ed73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c81a83d88f53ff198aa413819679f523 |
| publicationDate |
2012-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201232648-A |
| titleOfInvention |
A method of cutting a substrate and a device for cutting |
| abstract |
The present invention relates to a method of cutting a substrate by the introduction of thermo-mechanical tensions. The present invention also relates to the precise manufacturing of a substrate shape by the cutting method specified. The present invention also relates to a device for performing the method according to the present invention. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I731301-B |
| priorityDate |
2011-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |