| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_781c429e4e20536916ff74dcbe1b5417 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-851 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-851 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C19-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_731eb6d0fce0b7ca6323a40d93a4949f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa697b2c5449cee56163126c8a24fca9 |
| publicationDate |
2012-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201229265-A |
| titleOfInvention |
Ferromagnetic material sputtering target |
| abstract |
Provided is a ferromagnetic material sputtering target that: is a sputtering target comprising a metal with a composition including Cr at 20 mol% max., Ru at 0.5-30 mol%, and Co as the remainder; and is characterized by the target structure having a metal matrix (A) and a Co-Ru alloy phase (B) in the metal matrix (A) that contains 35 mol% or more Ru. A ferromagnetic material sputtering target capable of improving leakage magnetic flux and stable discharge with a magnetron sputtering device is obtained. |
| priorityDate |
2010-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |