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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-10
filingDate 2011-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50fef5b16fedcb9ef1f5a16bf633fb03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89433e09d3ed07165f113fd46fb415b6
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publicationDate 2012-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201228987-A
titleOfInvention Ceramic material, laminated body, member for semiconductor manufacturing device, and sputtering target member
abstract The ceramic material of the present invention has magnesium, aluminium, oxygen, and nitrogen as principal components, and has as the main phase a magnesium-aluminium oxynitride phase having a peak of at least 2θ =47-50 DEG in XRD using CuKa.
priorityDate 2010-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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