http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201227166-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0275 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 |
| filingDate | 2011-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c81f7d63eeba453b9726643b3f2b6ab |
| publicationDate | 2012-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201227166-A |
| titleOfInvention | Method of manufacturing a multi-tone photomask and pattern transfer method |
| abstract | To reduce the number of times of writing and development by utilizing film thickness reduction of a resist pattern and to improve the in-plane uniformity of the thickness reduction rate of the resist pattern between dense and coarse regions. A method includes a step of forming a first resist pattern which covers a light shielding portion forming region and a light semi-transmitting portion forming region and in which the thickness of a resist film in the light semi-transmitting portion forming region is smaller than that in the light-shielding portion forming region, and a step of reducing the thickness of the first resist pattern by supplying active oxygen to the first resist pattern. A part of active oxygen supplied to the first resist pattern is consumed by an exposed light semi-transmitting film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I681251-B |
| priorityDate | 2010-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.