http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201226488-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4c608a8531ea588aab7e23318e09a77
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
filingDate 2010-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0dc1dcd0bcfafc27338ee5ac60c958d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01692dd965dd9c8a2daa1ced3724faec
publicationDate 2012-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201226488-A
titleOfInvention Chemical mechanical polishing fluid
abstract The present invention discloses a chemical mechanical polishing fluid, which contains an activator, a precursor of a strong oxidation agent, a grinding agent, and water. The chemical mechanical polishing fluid of the present invention can prominently raise the polishing speed of tungsten.
priorityDate 2010-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID177577
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407330845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1117
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452322470
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10129897
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104755
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451095370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23661981
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584818
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92027580
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451483236
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23712892
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453265332
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450864287
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433322749
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453962614
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426108799
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558590
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451326926
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22921
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474490
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450566863
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24414
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454316624
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24424
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408795568
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID165912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24580
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448356700
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451110572
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449779460
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20476742
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6441498
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID107879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577471
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159865
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID115022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID312
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26250
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452927767
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9794626
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452758766
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92212909
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635

Total number of triples: 74.