| abstract |
This invention provides a salt represented by formula (I). [wherein, R1 and R2 respectivelly, independently represents fluorine atom, perfluroalkyl group having 1 to 6 carbon atoms, L1 represents single bond, alkanediyl having 1 to 6 carbon atoms, two-valent alicyclichydrocarbon group, -(CH2)t-CO-O-* or -(CH2)t-CO-O-CH2-(CH2)u-*, the alkanediyl and the -CH2- contained in the -(CH2)u- may be replaced by -O-. t represents an integer of 1 to 12, u represents an integer of 0 to 12, * represents the position bonded to Y. Y represents optionally substituted monovalent alicyclichydrocarbon group having 3 to 18 carbon atoms, the -CH2- constituted the alicyclichydrocarbon group may be replaced by -O-, -SO2- or-CO-. R3, R4, R5, R6 and R7 respectivelly, independently represents hydrogen atom, hydroxyl group, alkyl group having 1 to 6 carbon atoms, alkoxyl group having 1 to 6 carbon atoms, alkoxycarbonyloxy group having 2 to 7 carbon atoms or acyloxy group having 2 to 12 carbon atoms. the -CH2- contained in the alicyclic ring containing S+ may be replaced by -O- or -CO-. n represents an integer of 1 to 3. s represents an integer of 0 to 3. R8 respectivelly, independently represents alkyl group having 1 to 6 carbon atoms. |