http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201226160-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-04 |
| filingDate | 2011-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59fc9a7d9127fcaf36531b8fcab93015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c2aadc969aa1fbb4dc51715cb8e6eeb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43bc04b01f332232b8752f1105e3e5cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6369fd9fb3f4742a79ccafaa658c020 |
| publicationDate | 2012-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201226160-A |
| titleOfInvention | Template processing method, computer storage medium, and template processing device |
| abstract | The present invention pertains to a template processing method for coating a treatment fluid on a pattern region which is formed with a predetermined pattern on the surface of a template and for processing the pattern region. The method involves covering the pattern region with at least the coating surface of a treatment fluid coating tool for coating treatment fluid on the pattern region, arranging the treatment fluid coating tool so as to face the template such that the distance between the coating surface and the template region becomes a distance in which the treatment fluid produces a capillary effect, supplying the treatment fluid from the treatment fluid coating tool between the coating surface and the pattern region, and then diffusing the supplied treatment fluid only on the pattern region by means of the capillary effect. |
| priorityDate | 2010-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.