http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201222680-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf763bead024d28805fc3de749fa4576 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67389 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67775 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-52 |
| filingDate | 2011-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2fa76c40f35610d4f4c6271f6559658 |
| publicationDate | 2012-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201222680-A |
| titleOfInvention | Enclosure container and semiconductor production apparatus |
| abstract | The purpose of the present invention is to depress the production of reactants caused by the atmosphere inside an enclosure container. A semiconductor production apparatus 1 includes: a wafer 10 which is an object to be treated; a FOUP 20 which is an enclosure container containing the wafer 10; and an EFEM 40, transporting the wafer 10 between the FOUP 20 and an etching apparatus 30 in an enclosed state. The FOUP 20 includes a front door 20a; a sensor part 21, detecting at least one of the temperature, the humidity, and the gas concentration inside; and a transmission apparatus 25, transmitting the information detected by the sensor part. A reception device 31 receives the information transmitted from the transmission apparatus 25, and transmits the information to a purge part 43. The purge part 43 carries out a purge until the temperature etc in the FOUP 20 satisfies a predetermined reference value. |
| priorityDate | 2010-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.