| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00539
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823842
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02112 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate |
2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab3545439a031be5541ae90ab654ff8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12e93a4d255aa9010f67a086a3507a01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bc6acea28e7e3be54e8a1b30fea7399
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de4a6d60991645fc02a94e6fb1745f68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44544d28949688a823f8f9aea56d309e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4052aac76c851413af476fb25a00b40f |
| publicationDate |
2012-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201221627-A |
| titleOfInvention |
Composition and process for selectively etching metal nitrides |
| abstract |
A removal composition and process for selectively removing a first metal gate material (e.g., titanium nitride) relative to a second metal gate material (e.g., tantalum nitride) from a microelectronic device having said material thereon. The removal composition can include fluoride or alternatively be substantially devoid of fluoride. The substrate preferably comprises a high-k/metal gate integration scheme. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I808161-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11629315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I721311-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I594315-B |
| priorityDate |
2010-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |