http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201216353-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f756cb10c7ed259485b2d8e1e7618930 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1262 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2011-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd01780b29fe280fa70d7acb33f4b100 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2de44fd81f9e5c885a4e1ae4862e11c |
| publicationDate | 2012-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201216353-A |
| titleOfInvention | Method and apparatus for treating silicon substrate |
| abstract | Provided are a method and an apparatus for treating a silicon substrate for effectively removing a silicon oxide film formed on a surface of a silicon film and improving surface uniformity of the silicon film. The method comprises providing a substrate including a silicon film; providing a first fluid, which is capable of etching a silicon oxide film, to a surface of the substrate in a first time band; providing a second fluid containing water to the surface of the substrate in a second time band, which is different from the first time band; and providing a third fluid, which is capable of etching the silicon oxide film, has different ingredients as compared to the first fluid, and has high etching ratio with respect to the silicon oxide film, to a surface of the substrate in a third time band, which is different from the first time band and the second time band. |
| priorityDate | 2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.