| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-743 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate |
2011-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd26bfdaa2dac5c8072db3e90fecf997
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baeebdca3686fb192eddeaad0197e905
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c99dbb3dc2acf46009a6c0801af51a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32c1bd8894015fee804ce17b67dfe4d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b19712fb51245c859d011f0d5fd23bb3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac403b38b142e2ce65d41a9ae257430b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b1a9815764f9fc4e295759de4ef5c5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9c580b7fb1ff4b8126ecbdf441d4fd0 |
| publicationDate |
2012-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201214815-A |
| titleOfInvention |
Resist fortification for magnetic media patterning |
| abstract |
A method and apparatus for forming magnetic media substrate is provided. A patterned resist layer is formed on a substrate having a magnetically susceptible layer. A conformal protective layer is formed over the patterned resist layer to prevent degradation of the pattern during subsequent processing. The substrate is subjected to an energy treatment wherein energetic species penetrate portions of the patterned resist and conformal protective layer according to the pattern formed in the patterned resist, impacting the magnetically susceptible layer and modifying a magnetic property thereof. The patterned resist and conformal protective layers are then removed, leaving a magnetic substrate having a pattern of magnetic properties with a topography that is substantially unchanged. |
| priorityDate |
2010-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |