http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201213339-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1d73fa1e6c11c539b9d7a008d58a786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02 |
| filingDate | 2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e667f2bb5120f784e04d54830ccc3b7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99c4db9938122ac3c2721af93664e24f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5305128150191db5f93e43cfee6a4692 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce6c71faa7cb1ea4fef9799a5665cb45 |
| publicationDate | 2012-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201213339-A |
| titleOfInvention | Hydrosilane derivatives, method of producing the same, and method of producing silicon-containing thin film |
| abstract | This invention aims at providing a precursor from which a silicon-containing thin film can efficiently be produced at a low temperature of 500 DEG C or lower without using plasma or the like. The invention relates to produce a hydrosilane derivative represented by the general formula (1') by subjecting a chlorosilane derivative (3) to react with a compound M2Z (4) and produce the silicon-containing thin film with using the hydrosilane derivative as the precursor. [Chem. 1] (In the formula, R1 and R2 each independently represents an alkyl group having 3 to 12 carbon atoms; when Z is an isocyanato group or an isothiocyanato group, M2 represents a sodium atom or the like; when Z is an amino group, a mono-substituted amino group represented by NHR3, or a disubstituted amino group represented by NR4R5, M2 represents a hydrogen atom or the like; R3 represents an alkyl group having 1 to 12 carbon atoms which may be substituted by a flurorine atom; R4 and R5 each independently represents an alkyl group having 1 to 4 carbon atoms; and when Z is an alkenyl group having 2 to 6 carbon atoms, M2 represents a halogenated magnesium group.) |
| priorityDate | 2010-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 182.