http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201212728-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_efdcec9a5e24f35b6899fcbfb1114d63 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b9904fc5de46db77372a3c0207d085f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea61e28715cb84cb23d061d868c6f565 |
| publicationDate | 2012-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201212728-A |
| titleOfInvention | Plasma treatment device |
| abstract | The present invention is to provide a low cost plasma treatment device with an internally installed antenna, it is easy to maintain and inspect, and able to stably supply plasma. The plasma treatment device of the present invention includes: plural antenna units 20 set on the upper wall 111 of the vacuum container 11, the antenna units 20 includes a frame 21 made of dielectric material, protruding from the upper wall 111 toward the inside of vacuum container 11; a cover 22 for discharging the atmospheric gas of the frame to the outside of the vacuum container through the second gas outlet 25; a high-frequency antenna 23, fixed at the cover through the connection wire 24, is constituted by the conductor tube having gas through-holes 232 on the tube wall. Inert gas is supplied into the tube interior of the high-frequency antenna 23, and through the gas through-holes 232, the frame 21is filled with gas, and discharged to the outside of the vacuum container 11 through the second gas outlet 25. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I580324-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9947511-B2 |
| priorityDate | 2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.