Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-02 |
filingDate |
2011-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f3fbd6824067e90f9286f54a9d7a4a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2db0baeff546112812a1d9a95e297f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ac4a6179aefdc933f6088105a66f464 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07ea293e839a9b383f4cec85d6582d3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_224de863fd1196eb35b10d336a5ad45f |
publicationDate |
2012-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201211220-A |
titleOfInvention |
Polishing composition and polishing method |
abstract |
This polishing composition contains a water-soluble polymer, polishing accelerator and oxidizing agent. The water-soluble polymer is a polyamide-polyamine polymer having an amine value of 150 mg KOH/1 gsolid or greater. |
priorityDate |
2010-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |