| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0f2776bcc27d5099aa97f3212e1681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7dbdd60b964264f90e7dffb447f43382 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02428
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2011-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e64af99cb8085dd7b6d82dbcaa4bba1f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a5ae34c6c2a8039a0d5a122995f5dfa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df89b943b7c9285691b930a8dff5ec9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58ffca79442385a0d722f89ea13c84fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4334f15cf4d4e5cc52ba32b3adfd4dc7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_420155e37b2013cd52a39acef779b5f3 |
| publicationDate |
2012-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201203324-A |
| titleOfInvention |
Single crystal substrate with multilayer film, production method for single crystal substrate with multilayer film, and device production method |
| abstract |
In order to correct warping that occurs in the formation of a multilayer film, a single crystal substrate with a multilayer film is disclosed that includes a single crystal substrate (20) and a multilayer film (30) with compressive stress that has at least two layers formed upon one surface of the single crystal substrate (20), and in which, from among two regions (20U, 20D) that are obtained by dividing the single crystal substrate (20) into two equal parts in the thickness direction thereof, a heat denatured layer (22) is disposed within at least the region (20D) on the side of the surface opposite the surface of the single crystal substrate (20) upon which the multilayer film (30) has been formed. Also disclosed are a production method therefor and a device production method using said production method. |
| priorityDate |
2010-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |