| abstract |
A composition for the formation of an overlay film for immersion exposure, which comprises both a polymer [A] having structural units (I) represented by formula (1) and a solvent [S]. In formula (1), R1 is a hydrogen atom, methyl, or trifluoromethyl. It is preferable that the polymer [A] further has sulfo-containing structural units (II). It is preferable that the polymer [A] further has structural units (III) represented by formula (3). In formula (3), R2 is a hydrogen atom, methyl, or trifluoromethyl; and R3 is a linear or branched monovalent hydrocarbon group having 1 to 12 carbon atoms, or a monovalent alicyclic group having 3 to 20 carbon atoms, with the proviso that in the hydrocarbon group and the alicyclic group, at least one hydrogen atom is replaced by a fluorine atom. |