http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201201914-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-8593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-86332
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B9-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B15-30
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 2011-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38b37f218563217241e7908bd9c056a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aca458b4cefdeebcc1a82943b2a5bf01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff4dd2ba383a914157da0e732201a46d
publicationDate 2012-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201201914-A
titleOfInvention Processing liquid supply apparatus
abstract A process liquid feed mechanism includes a fixed cylinder with a thread around a peripheral surface, a movable cylinder provided coaxially with the fixed cylinder, a process liquid feed tube and an operating rotator. The movable cylinder is screw-engaged to the fixed cylinder. The process liquid feed tube is fixed in an axial position relative to the movable cylinder and passes through the lid and a cylinder including the fixed cylinder and the movable cylinder to be axially movable relative to the cylinder. The operating rotator includes an annular portion provided coaxially with the movable cylinder. An engaging portion and an engaged portion, which are provided in the movable cylinder and the annular portion respectively, rotate the movable cylinder through engagement therebetween with rotation of the operating rotator and release the engagement as a torque on the movable cylinder increases.
priorityDate 2010-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423503177
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54526665
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID582525
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID582525

Total number of triples: 22.