http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201144263-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b828305495e1cdb63947a3a18aa633d1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-15 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C303-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2011-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f0eb6517b28d8ab9f66864b2c65cead http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f15dcca982f21a89295692d063b5943 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6444ea90f24c5cc39eac75a8510ece2d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_627cb71ba7aca72f9f3bb1cacc9a6066 |
| publicationDate | 2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201144263-A |
| titleOfInvention | Photoacid generator, method for manufacturing the same, and resist composition comprising the same |
| abstract | There are provided a photoacid generator, a method for manufacturing the same, and a resist composition comprising the same. The photoacid generator is a compound represented by the following formula 1: wherein in the formula 1, Y represents any one selected from the group consisting of an alkyl group substituted with an aryl group, and an aromatic hydrocarbon group; Q1 and Q2 each independently represent a halogen atom; X represents any one selected from the group consisting of an alkanediyl, an alkenediyl, NR', S, O, CO and combinations thereof; R' represents any one selected from the group consisting of a hydrogen atom and an alkyl group; n represents an integer from 0 to 5; and A+ represents an organic counterion. The photoacid generator can produce, at the time of exposure, an acid which has a low diffusion rate, has a short diffusion distance, and exhibits an appropriate of degree of acidity so that the line width roughness (LWR) characteristics can be improved. |
| priorityDate | 2010-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 287.