| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3909cf4fafa65e4c261b0d919970e58f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3298
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3294
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3284
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3279
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B5-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-10 |
| filingDate |
2011-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56fc400aaac2770efa56fe43bcb4513f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdf66b9a17966e3e460407f4a8bf1760 |
| publicationDate |
2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201144252-A |
| titleOfInvention |
Spattering target of aluminum oxide-zinc oxide group |
| abstract |
The invention provides a spattering target of aluminum oxide-zinc oxide group, the spattering target being characterized in containing at least one of Pb and Cd. The spattering target of aluminum oxide-zinc oxide group of this invention has a high sintering density even if it is sintered at a low sintering temperature such as 1300 DEG C, for example. A high temperature sintering of the raw material powder is not necessary for obtaining a high sintering density and therefore less load is applied onto a sintering furnace. As a result an early deterioration of the sintering furnace can be prevented, a volatilization of such component as zinc from the raw material powder can be suppressed, and a film having a predetermined composition can be easily formed. The spattering target of the present invention has a small specific resistance and less spattering reduction rate. |
| priorityDate |
2010-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |