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publicationDate 2011-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201139740-A
titleOfInvention Etchant and method of manufacturing electronic device
abstract An etchant for selectively etching a doped semiconductor layer interposed between a metal electrode and an intrinsic semiconductor layer in an electronic device with respect to the intrinsic semiconductor layer, in which the etchant includes one selected from the group consisting of a transition metal, a transition metal salt, and a mixture thereof; and one selected from the group consisting of a hydrofluoric acid, an inorganic salt containing fluorine, and a mixture thereof.
priorityDate 2009-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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