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filingDate 2011-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_564d4a142baf020ab827aafdae5f416d
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publicationDate 2011-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201139273-A
titleOfInvention Use of a pressurized ceramic heat exchanger as an integral part of a plant for converting silicon tetrachloride to trichlorosilane
abstract The invention relates to the use of a ceramic heat exchanger as an integral part of a process for catalytic dehalogenation of silicon tetrachloride to trichlorosilane in the presence of hydrogen, wherein the product gas and the reactant gases are conducted as pressurized streams through the heat exchanger, and the heat exchanger comprises heat exchanger elements made from ceramic material.
priorityDate 2010-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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