http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201138992-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-2135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-02 |
| filingDate | 2011-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba5e052a16207277f6bee559b5e26b5f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4695b26ce8284dbdee4a8cda8403133d |
| publicationDate | 2011-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201138992-A |
| titleOfInvention | Nanoimprinting method, method for producing a droplet arrangement pattern, and method for fabricating substrates |
| abstract | To suppress fluctuations in thickness of a residual layer and defects due to residual gas in a resist film, onto which a pattern of protrusions and recesses is transferred, in a nanoimprinting method that employs the ink jet method to coat a substrate with droplets of resist material. Droplets (D) are coated onto a substrate (3) such that the spaces (Wa) between the droplets (D) along an A direction which is substantially parallel to the direction of the lines of a linear patter of protrusions and recesses (P1) are longer than the spaces between the droplets (D) in a B direction which is substantially perpendicular to the A direction, in a nanoimprinting method that coats a substrate with the droplets (D) of a resist material using the ink jet method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107942617-A |
| priorityDate | 2010-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.