http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201134035-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-32341 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0202 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-02 |
filingDate | 2010-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f6e5124f6d8683e72ae180790dc7a6b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7b50d106f43e3ccc753770dd5dde237 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_480af8f93464c297112585d69afda41f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5de47ebc353ee4772f7314a986c3011c |
publicationDate | 2011-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201134035-A |
titleOfInvention | Method for manufacturing semiconductor device |
abstract | A method for manufacturing a semiconductor device comprises: forming a semiconductor laminate structure on a substrate so as to form a wafer including a plurality of semiconductor lasers; forming a first groove between the semiconductor lasers on a major surface of the wafer; separating the wafer to laser bars wherein the semiconductor lasers are arrayed in bar shape after forming the first groove; forming a second groove in the first groove of the laser bars, a width of the second groove being identical to or narrower than a width of the first groove; and separating the laser bar into respective semiconductor lasers along the second groove. |
priorityDate | 2010-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069 |
Total number of triples: 17.