| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f9a0a4a9748f1b5f0df8d23aeb1e2491 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04 |
| filingDate |
2010-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b16db2823865be1e15eaa4bd84f7fa59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55984679e91e84d3b1f98714a6640bff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc56d0277709b8f823ea25889c546401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da646d98157d5d85cd40943248fb35fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef6b49da5f20baf9fe3bf6611c78bc64 |
| publicationDate |
2011-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201133875-A |
| titleOfInvention |
Process for the manufacture of wafers for solar cells at ambient pressure |
| abstract |
Solar cells are manufactured from P-type doped monocrystalline or polycrystalline silicon ingots by sawing wafers and applying an N-type doping. The wafers can be treated by etching them, in a plasma assisted process, with an etching gas containing or consisting of carbonyl fluoride. Hereby, the surface is roughened so that the degree of light reflection is reduced, or glass-like phosphorus-containing oxide coatings caused by phosphorus doping are removed. Carbonyl fluoride is also very suitable to selectively etch silicon oxide in silicon oxide/silicon composites. |
| priorityDate |
2009-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |